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SPIE Proceedings [SPIE Hague International Symposium - The Hague, Netherlands (Monday 30 March 1987)] In-Process Optical Metrology for Precision Machining - Dynamically Focusing Electro-Optical Sensor-System For Micro Rofilometry
U., Breitmeier, J., Ahlers R., Langenbeck, PeterVolume:
802
Year:
1987
Language:
english
DOI:
10.1117/12.967118
File:
PDF, 3.34 MB
english, 1987