Study of the new CSAR62 positive tone electron-beam resist...

Journal of Physics Conference Series 2016 / 03 Vol. 700

Study of the new CSAR62 positive tone electron-beam resist at 40 keV electron energy

Andok, R, Bencurova, A, Vutova, K, Koleva, E, Nemec, P, Hrkut, P, Kostic, I, Mladenov, G
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Volume:
700
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/700/1/012030
Date:
March, 2016
File:
PDF, 1.37 MB
english, 2016
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