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SPIE Proceedings [SPIE Aerospace Sensing - Orlando, FL (Monday 20 April 1992)] Sensors and Sensor Systems for Guidance and Navigation II - Fabrication and testing of metal micromechanisms with rotational and translational motion
Guckel, Henry, Christenson, Todd R., Skrobis, Kenneth J., Welch, Sharon S.Volume:
1694
Year:
1992
Language:
english
DOI:
10.1117/12.138117
File:
PDF, 590 KB
english, 1992