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SPIE Proceedings [SPIE San Diego '92 - San Diego, CA (Sunday 19 July 1992)] Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography - Large-area soft x-ray projection lithography using multilayer mirrors structured by RIE
Rahn, Steffen, Kloidt, Andreas, Kleineberg, Ulf, Schmiedeskamp, Bernt, Kadel, Klaus, Schomburg, Werner K., Hormes, F. J., Heinzmann, Ulrich, Hoover, Richard B., Walker II, Arthur B. C.Volume:
1742
Year:
1993
Language:
english
DOI:
10.1117/12.140591
File:
PDF, 696 KB
english, 1993