SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Interferometry VI: Applications - Novel technique for performing ellipsometric measurements in a submicrometer area
Fanton, Jeffrey T., Opsal, Jon L., Rosencwaig, Allan, Willenborg, David, Pryputniewicz, Ryszard J., Brown, Gordon M., Jueptner, Werner P. O.Volume:
2004
Year:
1994
Language:
english
DOI:
10.1117/12.172605
File:
PDF, 570 KB
english, 1994