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SPIE Proceedings [SPIE SPIE Optical Engineering + Applications - San Diego, California, United States (Sunday 25 August 2013)] Dimensional Optical Metrology and Inspection for Practical Applications II - Using fiber optic probes for photoluminescence and evaluation of an InGaN/GaN epi-wafer
Jung, Woohyun, Kim, Jongki, Joe, Hang-Eun, Min, Byung-Kwon, Oh, Kyunghwan, Harding, Kevin G., Huang, Peisen S., Yoshizawa, ToruVolume:
8839
Year:
2013
Language:
english
DOI:
10.1117/12.2024634
File:
PDF, 568 KB
english, 2013