SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - A bi-material microbeam based thermal actuator for out-of-plane rotation
Piyawattanametha, Wibool, Park, Yong-Hwa, Najafi Sohi, Ali, Nieva, Patricia M.Volume:
8977
Year:
2014
Language:
english
DOI:
10.1117/12.2040728
File:
PDF, 1.96 MB
english, 2014