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SPIE Proceedings [SPIE Photonics West '95 - San Jose, CA (Wednesday 1 February 1995)] Laser-Induced Thin Film Processing - Excimer-laser-beam-scanning chemical vapor deposition of ultrathin multilayer films for soft x-ray mirrors
Mutoh, Katsuhiko, Yamada, Yuka, Takeyama, Shigeru, Miyata, Takeo, Dubowski, Jan J.Volume:
2403
Year:
1995
Language:
english
DOI:
10.1117/12.206258
File:
PDF, 331 KB
english, 1995