SPIE Proceedings [SPIE SPIE's 1995 Symposium on Microlithography - Santa Clara, CA (Sunday 19 February 1995)] Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing V - Creation of a topology in metal phthalocyanine layers
Reznikova, Elena F., Prokhorova, Stalina A., Basova, T. V., Ajupov, B. M., Naz'mov, Vladimir P., Makarov, I. A., Igumenov, Igor K., Krieger, Jurij H., Warlaumont, John M.Volume:
2437
Year:
1995
Language:
english
DOI:
10.1117/12.209179
File:
PDF, 356 KB
english, 1995