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SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 29 September 1997)] Microelectronic Structures and MEMS for Optical Processing III - Buried double p-n junction structure using a CMOS process for wavelength detection
Lu, Guo N., Ben Chouikha, Mohamed, Sedjil, Mohamed, Sou, Gerard, Alquie, George, Rigo, Serge, Motamedi, M. Edward, Herzig, Hans PeterVolume:
3226
Year:
1997
Language:
english
DOI:
10.1117/12.284570
File:
PDF, 1.20 MB
english, 1997