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SPIE Proceedings [SPIE Micromachining and Microfabrication - Santa Clara, CA (Sunday 20 September 1998)] Micromachining and Microfabrication Process Technology IV - Microfabrication of membrane-based devices by HARSE and combined HARSE/wet etching
Manginell, Ronald P., Frye-Mason, Gregory C., Schubert, W. K., Shul, Randy J., Willison, Christi L., Smith, James H.Volume:
3511
Year:
1998
Language:
english
DOI:
10.1117/12.324310
File:
PDF, 1.99 MB
english, 1998