SPIE Proceedings [SPIE 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 15 November 1999)] 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Advanced writing strategies for high-end mask making
Lemke, Melchior, Gramss, Juergen, Doering, Hans-Joachim, Eichhorn, Hans, Schubert, Gerhard, Behringer, Uwe F. W.Volume:
3996
Year:
2000
Language:
english
DOI:
10.1117/12.377107
File:
PDF, 1.02 MB
english, 2000