SPIE Proceedings [SPIE Photonics West 2001 - LASE - San Jose, CA (Saturday 20 January 2001)] Laser Applications in Microelectronic and Optoelectronic Manufacturing VI - Laser direct writing of copper on polyimide, FR4, and Al203 substrates from solid metalorganic film
Wang, Xincai, Zheng, HongYu, Lim, Gnian Cher, Gower, Malcolm C., Helvajian, Henry, Sugioka, Koji, Dubowski, Jan J.Volume:
4274
Year:
2001
Language:
english
DOI:
10.1117/12.432533
File:
PDF, 1.43 MB
english, 2001