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SPIE Proceedings [SPIE Advanced Microelectronic Manufacturing - Santa Clara, CA (Sunday 23 February 2003)] Cost and Performance in Integrated Circuit Creation - DIVAS: an integrated networked system for mask defect dispositioning and defect management
Munir, Saghir, Bald, Dan, Tolani, Vikram, Ghadiali, Firoz, Wong, Alfred K. K., Monahan, Kevin M.Volume:
5043
Year:
2003
Language:
english
DOI:
10.1117/12.487634
File:
PDF, 1.72 MB
english, 2003