SPIE Proceedings [SPIE ICMIT 2005: Information Systems and Signal Processing - ChongQing, China (Tuesday 20 September 2005)] ICMIT 2005: Information Systems and Signal Processing - The principle of differential grating displacement sensor
Chen, Xihou, Wei, Yunlong, Chong, Kil To, Peng, Donglin, Zhang, Xinghong, Takahashi, Takayuki, Liu, Shengping, Liu, Xiaokang, Li, Zushu, Jiang, Zhongwei, Choi, Jin YoungVolume:
6041
Year:
2005
Language:
english
DOI:
10.1117/12.664363
File:
PDF, 253 KB
english, 2005