SPIE Proceedings [SPIE Photomask and Next-Generation...

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SPIE Proceedings [SPIE Photomask and Next-Generation Lithography Mask Technology XIV - Yokohama, Japan (Tuesday 17 April 2007)] Photomask and Next-Generation Lithography Mask Technology XIV - New method to estimate systematic yield caused by lithography manufacturability

Oishi, Hidetoshi, Watanabe, Hidehiro, Oka, Mikio, Tsuchiya, Kensuke, Ogawa, Kazuhisa, Ohnuma, Hidetoshi
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Volume:
6607
Year:
2007
Language:
english
DOI:
10.1117/12.728957
File:
PDF, 993 KB
english, 2007
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