SPIE Proceedings [SPIE International Workshop and Conference on Photonics and Nanotechnology 2007 - Pattaya, Thailand (Sunday 16 December 2007)] ICMIT 2007: Mechatronics, MEMS, and Smart Materials - Two-degree-of-freedom control of a self-sensing micro-actuator for HDD
Sasaki, Minoru, Sasaki, Minoru, Choi Sang, Gisang, Fujihara, Koji, Nam, Yoonsu, Li, Zushu, Ikeura, Ryojun, Ito, Satoshi, Kim, Hyungki, Xue, FangzhengVolume:
6794
Year:
2007
Language:
english
DOI:
10.1117/12.783779
File:
PDF, 218 KB
english, 2007