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SPIE Proceedings [SPIE SPIE Photonics Europe - Brussels, Belgium (Monday 12 April 2010)] Optical Micro- and Nanometrology III - Simulation and in-plane movement characterization of 2D MEMS platform
Krężel, Jerzy, Gorecki, Christophe, Asundi, Anand K., Laszczyk, Karolina, Bargiel, Sylwester, Osten, Wolfgang, Gorecki, Christophe, Kujawińska, Małgorzata, Parriaux, Olivier, Tonchev, SvetlenVolume:
7718
Year:
2010
Language:
english
DOI:
10.1117/12.855747
File:
PDF, 5.03 MB
english, 2010