SPIE Proceedings [SPIE Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Hangzhou, China (Sunday 8 August 2010)] Sixth International Symposium on Precision Engineering Measurements and Instrumentation - Temperature-frequency characteristics of silicon micro-cantilever and measurement techniques in high temperature environment
She, Dongsheng, Wang, Xiagdong, Zhang, Xiwen, Wang, LidingVolume:
7544
Year:
2010
Language:
english
DOI:
10.1117/12.885680
File:
PDF, 406 KB
english, 2010