Frequency Response Reduced Order Model of Primary Resonance of Electrostatically Actuated Mems Circular Plate Resonators
Caruntu, Dumitru I., Oyervides, ReynaldoLanguage:
english
Journal:
Communications in Nonlinear Science and Numerical Simulation
DOI:
10.1016/j.cnsns.2016.06.032
Date:
July, 2016
File:
PDF, 1008 KB
english, 2016