Structure evolution in reactively sputtered molybdenum oxide thin films
Pachlhofer, Julia M., Jachs, Christoph, Franz, Robert, Franzke, Enrico, Köstenbauer, Harald, Winkler, Jörg, Mitterer, ChristianVolume:
131
Language:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2016.07.002
Date:
September, 2016
File:
PDF, 1.22 MB
english, 2016