Tuning of refractive index in Al-doped ZnO films by...

Journal of Physics D Applied Physics 2016 / 07 Vol. 49; Iss. 29

Tuning of refractive index in Al-doped ZnO films by rf-sputtering using oblique angle deposition

Martín-Tovar, E A, Denis-Alcocer, E, Chan y Díaz, E, Castro-Rodríguez, R, Iribarren, A
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Volume:
49
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/49/29/295302
Date:
July, 2016
File:
PDF, 1.05 MB
english, 2016
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