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SPIE Proceedings [SPIE Microelectronic Processing '93 - Monterey, CA (Sunday 26 September 1993)] Multilevel Interconnection: Issues That Impact Competitiveness - Extending resist-etch-back planarization to 0.5-μm logic and ASIC circuits
White, Ted R., Ciosek, W. J., Prinz, E. J., King, Charles F., Blumenthal, R., Stager, Charles W., Somero, B. M., Woo, M. P., Sharma, U., Fiordalice, R. W., Klein, Jeff L., Hoang, Hoang H., Schutz, RonVolume:
2090
Year:
1993
Language:
english
DOI:
10.1117/12.156513
File:
PDF, 432 KB
english, 1993