SPIE Proceedings [SPIE International Conference on Micro-and Nano-Electronics 2012 - Zvenlgorod, Russian Federation (Monday 1 October 2012)] International Conference Micro- and Nano-Electronics 2012 - Effective probe for scanning electron microscope
Larionov, Yu. V., Novikov, Yu. A., Orlikovsky, Alexander A.Volume:
8700
Year:
2013
Language:
english
DOI:
10.1117/12.2016917
File:
PDF, 513 KB
english, 2013