![](/img/cover-not-exists.png)
SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Microlithography and Metrology in Micromachining - Thin metal film thermal microsensors
Vladimirsky, Yuli, Rau, N., Manohara, Harish M., Morris, Kevin J., Klopf, J. Michael, Calderon, Gina M., Vladimirsky, Olga, Postek, Michael T.Volume:
2640
Year:
1995
Language:
english
DOI:
10.1117/12.222647
File:
PDF, 710 KB
english, 1995