SPIE Proceedings [SPIE San Diego '90, 8-13 July - San Diego, CA (Sunday 8 July 1990)] Advanced X-Ray/EUV Radiation Sources and Applications - Soft and hard x-ray reflectivities of multilayers fabricated by alternating-material sputter deposition
Takenaka, Hisataka, Ishii, Yoshikazu, Kinoshita, Hiroo, Kurihara, Kenji, Knauer, James P., Shenoy, Gopal K.Volume:
1345
Year:
1991
Language:
english
DOI:
10.1117/12.23324
File:
PDF, 529 KB
english, 1991