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SPIE Proceedings [SPIE Metal/Nonmetal Microsystems: Physics, Technology, and Applications - Polanica Zdroj, Poland (Monday 11 September 1995)] Metal/Nonmetal Microsystems: Physics, Technology, and Applications - Plasma formation of thin alumina films
Novak, Stanislov, Hrach, Rudolf, Pavlik, Jaroslav, Hrachova, Vera, Licznerski, Benedykt W., Dziedzic, AndrzejVolume:
2780
Year:
1996
Language:
english
DOI:
10.1117/12.238127
File:
PDF, 147 KB
english, 1996