SPIE Proceedings [SPIE ISMA '97 International Symposium on Microelectronics and Assembly - Singapore, Singapore (Monday 23 June 1997)] Microlithographic Techniques in IC Fabrication - Compact plasma focus soft x-ray source with high repetition rate and high intensity
Lee, Sing, Lee, Paul C. K., Zhang, Guan, Feng, X., Serban, Adrian, Liu, Mahe, Wong, Terence K. S., Selvam, C., Thang, A., Yoon, Soon Fatt, Yu, Raymond, Mack, Chris A.Volume:
3183
Year:
1997
Language:
english
DOI:
10.1117/12.280531
File:
PDF, 873 KB
english, 1997