SPIE Proceedings [SPIE Microelectronic Manufacturing -...

  • Main
  • SPIE Proceedings [SPIE Microelectronic...

SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Methodology for real-time feedback variable selection for manufacturing process control: theoretical and simulation results

Patterson, Oliver D., Khargonekar, Pramod P., Toprac, Anthony J., Dang, Kim
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
3507
Year:
1998
Language:
english
DOI:
10.1117/12.324332
File:
PDF, 461 KB
english, 1998
Conversion to is in progress
Conversion to is failed