SPIE Proceedings [SPIE Microelectronic Manufacturing - Santa Clara, CA (Sunday 20 September 1998)] Process, Equipment, and Materials Control in Integrated Circuit Manufacturing IV - Fast-ramp rapid vertical processor for 300-mm Si wafer processing
Porter, Cole, Laser, Allan, Herring, Robert, Pandey, Pradeep, Toprac, Anthony J., Dang, KimVolume:
3507
Year:
1998
Language:
english
DOI:
10.1117/12.324342
File:
PDF, 573 KB
english, 1998