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SPIE Proceedings [SPIE Microlithography '99 - Santa Clara, CA (Sunday 14 March 1999)] Optical Microlithography XII - Challenge to 0.13-μm device patterning using KrF
Kim, Insung, Lee, Junghyun, Cha, DongHo, Park, Joonsoo, Cho, Hanku, Moon, Joo-Tae, Van den Hove, LucVolume:
3679
Year:
1999
Language:
english
DOI:
10.1117/12.354405
File:
PDF, 1.05 MB
english, 1999