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SPIE Proceedings [SPIE Asia Pacific Symposium on Microelectronics and MEMS - Gold Coast, Australia (Wednesday 27 October 1999)] Design, Characterization, and Packaging for MEMS and Microelectronics - Magnetic analysis of a micromachined magnetic actuator using the finite element method
Ko, Chun-Hsu, Yang, J. J., Chiou, J.C., Chen, Sheng-Chih, Kao, T. H., Courtois, Bernard, Demidenko, Serge N.Volume:
3893
Year:
1999
Language:
english
DOI:
10.1117/12.368453
File:
PDF, 834 KB
english, 1999