SPIE Proceedings [SPIE SPIE's International Symposium on Optical Science, Engineering, and Instrumentation - Denver, CO (Sunday 18 July 1999)] Optical Manufacturing and Testing III - Knife-edge test for characterization of subnanometer deformations in micro-optical surfaces
Zamkotsian, Frederic, Dohlen, Kjetil, Lanzoni, Patrick, Mazzanti, Silvio P., Michel, Marie-Laurence, Buat, Veronique, Burgarella, Denis, Stahl, H. PhilipVolume:
3782
Year:
1999
Language:
english
DOI:
10.1117/12.369202
File:
PDF, 689 KB
english, 1999