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SPIE Proceedings [SPIE Symposium on High-Power Lasers and Applications - San Jose, CA (Saturday 22 January 2000)] Laser Applications in Microelectronic and Optoelectronic Manufacturing V - Novel thin-film deposition method and system with IR-FEL
Yasumoto, Masato, Umesaki, Norimasa, Tomimasu, Takio, Ishizu, Akira, Awazu, Kunio, Helvajian, Henry, Sugioka, Koji, Gower, Malcolm C., Dubowski, Jan J.Volume:
3933
Year:
2000
Language:
english
DOI:
10.1117/12.387589
File:
PDF, 1.63 MB
english, 2000