SPIE Proceedings [SPIE International Symposium on Optical Science and Technology - San Diego, CA (Sunday 30 July 2000)] Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries - X-ray investigations of a near surface layer of metal samples
Gilev, Oleg N., Asadchikov, Victor E., Duparre, Angela, Havronin, Nikolai A., Kozhevnikov, Igor V., Krivonosov, Yury S., Kuznetsov, Sergey P., Mikerov, Vitaly I., Ostashev, Vladimir I., Tukarev, VladiVolume:
4099
Year:
2000
DOI:
10.1117/12.405828
File:
PDF, 364 KB
2000