SPIE Proceedings [SPIE Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - St. Petersburg, Russia (Monday 12 June 2000)] Fourth International Workshop on Nondestructive Testing and Computer Simulations in Science and Engineering - Optimization of integrated circuit technology
Kuzmicz, Wieslaw B., Malyshev, Viktor S., Nelayev, Vladislav V., Stempitsky, Viktor R., Melker, Alexander I.Volume:
4348
Year:
2001
Language:
english
DOI:
10.1117/12.417685
File:
PDF, 165 KB
english, 2001