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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Francisco, CA (Monday 22 October 2001)] Reliability, Testing, and Characterization of MEMS/MOEMS - Nondestructive acoustic microimaging (AMI) analysis of MEMS materials, manufacturing, and packaging
Martell, Steven R., Semmens, Janet E., Kessler, Lawrence W., Ramesham, RajeshuniVolume:
4558
Year:
2001
Language:
english
DOI:
10.1117/12.443000
File:
PDF, 1.11 MB
english, 2001