SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] BioMEMS and Smart Nanostructures - Nanofabrication processes for single-ion implantation of silicon quantum computer devices
McKinnon, Rita P., Stanley, Fay E., Buehler, Tilo M., Gauja, Eric, Peceros, Katia, Macks, Linda D., Mitic, Mladen, Chan, Victor, Dzurak, Andrew S., Clark, Robert G., Yang, Changyi, Jamieson, David N.,Volume:
4590
Year:
2001
Language:
english
DOI:
10.1117/12.454618
File:
PDF, 1.80 MB
english, 2001