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SPIE Proceedings [SPIE SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems - Melbourne, Australia (Monday 16 December 2002)] Smart Structures, Devices, and Systems - Release and surface-passivation techniques of stiction-free surface micromachined structures
Hariz, Alex J., Harvey, Erol C., Abbott, Derek, Varadan, Vijay K.Volume:
4935
Year:
2002
Language:
english
DOI:
10.1117/12.472815
File:
PDF, 78 KB
english, 2002