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SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Reliability, Testing, and Characterization of MEMS/MOEMS III - MEMS process error characterization using lateral resonant structures
Johnson, George C., Tanner, Danelle M., Ramesham, Rajeshuni, Allen, A. MillerVolume:
5343
Year:
2004
Language:
english
DOI:
10.1117/12.524236
File:
PDF, 383 KB
english, 2004