SPIE Proceedings [SPIE Micromachining and Microfabrication - San Jose, CA (Saturday 24 January 2004)] Micromachining Technology for Micro-Optics and Nano-Optics II - Inadvertent and intentional subwavelength surface texture on micro-optical components
Kemme, Shanalyn A., Johnson, Eric G., Nordin, Gregory P., Peters, David W., Carter, Tony R., Samora, Sally, Ruby, Douglas S., Zaidi, Saleem H.Volume:
5347
Year:
2004
Language:
english
DOI:
10.1117/12.524606
File:
PDF, 642 KB
english, 2004