SPIE Proceedings [SPIE Optical Metrology - Munich, Germany...

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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Compact laser scanning confocal microscope

Beghuin, D., Ottevaere, Heidi, DeWolf, Peter, vandeVen, M., Ameloot, M., Wiersma, Diederik S., Claessens, D., Van Oostveldt, P.
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Volume:
5858
Year:
2005
Language:
english
DOI:
10.1117/12.611819
File:
PDF, 1.64 MB
english, 2005
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