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SPIE Proceedings [SPIE Optical Metrology - Munich, Germany (Monday 13 June 2005)] Nano- and Micro-Metrology - Non-destructive optical system based on digital holographic microscope for quasi real-time characterization of micromechanical shunt switch
Striano, Valerio, Ottevaere, Heidi, DeWolf, Peter, Coppola, Giuseppe, Ferraro, Pietro, Wiersma, Diederik S., Alfieri, Domenico, De Nicola, Sergio, Finizio, Andrea, Pierattini, Giovanni, Marcelli, RomoVolume:
5858
Year:
2005
Language:
english
DOI:
10.1117/12.612746
File:
PDF, 448 KB
english, 2005