SPIE Proceedings [SPIE International Conference on Lasers,...

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SPIE Proceedings [SPIE International Conference on Lasers, Applications, and Technologies '07 - Minsk, Belarus (Monday 28 May 2007)] International Conference on Lasers, Applications, and Technologies 2007: High-Power Lasers and Applications - High-efficient discharge-pumped ArF (193 nm) excimer laser with a TPI thyratron as a high-voltage switch

Panchenko, Vladislav, Razhev, Alexander M., Zhupikov, Andrey A., Golubev, Vladimir, Ionin, Andrey, Churkin, Dmitry S., Chumakov, Alexander
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Volume:
6735
Year:
2007
Language:
english
DOI:
10.1117/12.753252
File:
PDF, 216 KB
english, 2007
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