SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

  • Main
  • SPIE Proceedings [SPIE SPIE Advanced...

SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California, USA (Sunday 24 February 2008)] Design for Manufacturability through Design-Process Integration II - Inverse lithography as a DFM tool: accelerating design rule development with model-based assist feature placement, fast optical proximity correction and lithographic hotspot detection

Prins, Steve, Singh, Vivek K., Rieger, Michael L., Blatchford, James, Chang, Simon, Flanagin, Lewis, Jessen, Scott, O'Brien, Sean, Xiao, Guangming, Lin, Timothy, Dam, Thuc, Gleason, Bob
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6925
Year:
2008
Language:
english
DOI:
10.1117/12.774581
File:
PDF, 647 KB
english, 2008
Conversion to is in progress
Conversion to is failed