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SPIE Proceedings [SPIE International Conference of Optical Instrument and Technology - Beijing, China (Sunday 16 November 2008)] 2008 International Conference on Optical Instruments and Technology: Optoelectronic Measurement Technology and Applications - A high precision metrology method and system for thin film's parameters based on reflectance spectrum
Dai, Zhiyong, Ye, Shenghua, Zhang, Guangjun, Peng, Zengshou, Ou, Zhonghua, Ni, Jun, Liu, Yongzhi, Zhang, LixunVolume:
7160
Year:
2008
Language:
english
DOI:
10.1117/12.807076
File:
PDF, 356 KB
english, 2008