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SPIE Proceedings [SPIE Smart Materials, Nano-and Micro-Smart Systems - Melbourne, Australia (Tuesday 9 December 2008)] Smart Materials V - Atomic layer deposition of SIO 2 on porous alumina membranes: controlling the pore size and transport properties

Velleman, Leonora, Voelcker, Nicolas H., Thissen, Helmut W., Traini, Gerry, Evans, Peter J., Atanacio, Armand, Shapter, Joe G., Losic, Dusan
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Volume:
7267
Year:
2008
Language:
english
DOI:
10.1117/12.810716
File:
PDF, 712 KB
english, 2008
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