SPIE Proceedings [SPIE 4th International Symposium on Advanced Optical Manufacturing and testing Technologies: Large Mirrors and Telescopes - Chengdu, China (Wednesday 19 November 2008)] 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes - Evolution of wavelength shrinkage in lithography
Jiang, Wenhan, Kameyama, Masaomi, McCallum, Martin, Geyl, Roland, Cho, Myung K., Owa, Soichi, Wu, FanVolume:
7281
Year:
2008
Language:
english
DOI:
10.1117/12.831424
File:
PDF, 169 KB
english, 2008