SPIE Proceedings [SPIE SPIE Advanced Lithography - San...

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SPIE Proceedings [SPIE SPIE Advanced Lithography - San Jose, California (Sunday 21 February 2010)] Optical Microlithography XXIII - Implementing and validating double patterning in 22-nm to 16-nm product design and patterning flows

Noh, Myung-Soo, Dusa, Mircea V., Conley, Will, Seo, Beom-Seok, Lee, Suk-Joo, Miloslavsky, Alex, Cork, Christopher, Barnes, Levi, Lucas, Kevin
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Volume:
7640
Year:
2010
Language:
english
DOI:
10.1117/12.848194
File:
PDF, 1.71 MB
english, 2010
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