SPIE Proceedings [SPIE SPIE Microtechnologies - Prague, Czech Republic (Monday 18 April 2011)] Smart Sensors, Actuators, and MEMS V - Airborne particle generation for optical tweezers by thermo-mechanical membrane actuators
Polster, T., Schmid, Ulrich, Sánchez-Rojas, José Luis, Leopold, S., Hoffmann, M., Leester-Schaedel, MonikaVolume:
8066
Year:
2011
Language:
english
DOI:
10.1117/12.886727
File:
PDF, 830 KB
english, 2011